Solid pyrolytic graphite - for vacuum furnace, substrate heating & thin film processing environments

Pyrolytic graphite is produced using  high temperature chemical vapor deposition (CVD) furnace technology. The material is grown onto a substrate, giving it a layered composition. This means it has different properties in different planes. In the Z plane (across its layers) it has low thermal conductivity, acting as an insulator. In the XY plane (with the layers) it has very high thermal conductivity, acting as a superb conductor. Its other properties are high density, high strength, high hardness, high purity and virtually zero porosity.

These properties make it ideal for producing very thin flat heating elements (giving superb thermal uniformity), ion implantation apertures and components, MOCVD susceptors and PECVD plates/discs.

Pyrolytic graphite CVD coatings can also be applied to many materials to enhance the base material's properties. On graphite, coating reduces out-gassing and particle contamination of the process.

Pyrolytic graphite is easily machined (CEVP offers a complete service including manual or CNC machining), and is capable of being fabricated into simple or complex components, in small or large volumes. If you would like substrates coated with pyrolytic graphite, we offer a fast turn around service for our customers all over the world.

CEVP has extensive experience with this material. If you would like to discuss your requirement, simply email us, or call us directly, with no obligation.