Tool architecture: modular hardware & software
Modular automation hardware
CEVP employs modular design and architectural principles when developing tools. This approach has benefits for both CEVP and its users, including simple and fast configuration and system building for custom applications, the ability to configure tools to any scale (way beyond general commercial tools), compact system footprints, and easy upgrade and maintenance throughout a tool's life.
At the heart of the system is an advanced and modular PLC, that provides a versatile platform that can be populated with high counts of conventional digital/analogue I/O and/or fieldbus interfaces, to suit the application.
Distributed control system principles are employed throughout the tool, using the Profibus fieldbus protocol, to simplify wiring, tool layout and minimise footprint. An advanced fieldbus-interfaced I/O building block that accommodates both pneumatic and electrical I/O is used to provide an elegant and space-efficient solution of distributing automation resources around the tool - in any combination to suit the user's requirements.
- Graphical MIMIC interface of system
- Diagnostics screen
- Alarms and interlocks page
- Engineering page
- Fully interlocked for safer operation in manual and automatic modes of operation
- Password protection for Advanced User, Operator and Engineer
- Full datalogging in all modes
- Full wafer/substrate traceability on each process run
Hardware architecture
- Modular PLC running high-level language
- Distributed control architecture using Profibus
- Fieldbus-interfaced pneumatic/electrical I/O blocks
We offer FREE sputter tool process and maintenance advice: If you have a problem, call +44 (0)1273 515899 or email sputterdoctor@cevp.co.uk
PLC and the high-level Flex32 programming language
Festo
Pneumatic/electrical I/O and fieldbus tools
Profibus (industry association)
Fieldbus protocol