Tool architecture: modular hardware & software

Customised tool design
Customised tool designCEVP's reputation is built on innovation: our tools often break new ground - such as PECVD at 1200C, or room-temperature nanotube growth. If you require a tool for a novel, unusual or demanding process - CEVP can provide a versatile solution.

Unlike most commercial equipment, CEVP's sputtering and nanomaterial tools are highly configurable, and can be provided with almost unlimited ports for instrumentation and analysis, with extra load/lock and inline processing facilities etc. We will also customise the control software: examples of our work include recipes for non-uniform deposition such as gradient deposition, or processing segments of the substrate area.

Product specifications
Control software
- Graphical MIMIC interface of system
- Diagnostics screen
- Alarms and interlocks page
- Engineering page
- Fully interlocked for safer operation in manual and automatic modes of operation
- Password protection for Advanced User, Operator and Engineer
- Full datalogging in all modes
- Full wafer/substrate traceability on each process run

Hardware architecture
- Modular PLC running high-level language
- Distributed control architecture using Profibus
- Fieldbus-interfaced pneumatic/electrical I/O blocks
Improve your sputtering!

We offer FREE sputter tool process and maintenance advice: If you have a problem, call +44 (0)1273 515899 or email sputterdoctor@cevp.co.uk
More information?
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CEVP's partners
Colter Systems
PLC and the high-level Flex32 programming language

Festo
Pneumatic/electrical I/O and fieldbus tools

Profibus (industry association)
Fieldbus protocol