Halogen substrate heaters for thin film deposition processes

Halogen Lamp and reflector (general substrate heating and sample degassing)

These units utilize the heat given off from a special quartz halogen bulb fitted into a gold plated metal reflector. The heat is virtually instantaneous and very easy to control. Units can be coupled together to heat over a larger area with good thermal uniformity. These are the simplest type of heater for vacuum applications, but are limited by the maximum temperature that the substrate can obtain. They also lose performance in thin film deposition processes, when deposited material coats the reflector and quartz bulb. Replacement of the bulb, when it has reached the end of its life or has to much deposition product on it, is very quick and easy.

The maximum long term substrate temperature is around 400-600 °C. Higher temperatures can be obtained if a water cooled quartz bulb is used.

If you have an application that you would like to discuss, or would like a full specification, please contact us.